Solution: Analog & Mixed Signal

DV-Prime & Da Vinci Product Families

Spin Wet Clean

These products provide the process flexibility needed with high productivity to address multiple wafer cleaning steps throughout manufacturing.

Flex Product Family

Atomic Layer Etch (ALE) Reactive Ion Etch

Lam’s dielectric etch systems offer application-focused capabilities for creating a wide range of challenging structures in advanced devices.

Kiyo Product Family

Atomic Layer Etch (ALE) Reactive Ion Etch

Lam’s market-leading conductor etch products deliver the high-performance precision and control at high productivity needed for critical device features.

SP Series Product Family

Spin Wet Clean

This proven product family delivers reliable, cost-efficient wet clean/wet etch solutions that gently remove unwanted materials from the wafer.

VECTOR Product Family

Plasma-Enhanced Chemical Vapor Deposition (PECVD)

Lam’s PECVD product family provides precise dielectric film deposition at high productivity for a wide range of device applications.

Versys Metal Product Family

Reactive Ion Etch

These metal etch products provide excellent process control at high-productivity for electrical connection and metal hardmask applications.

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