Archives: Products
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Reliant Deposition Products
Lam’s refurbished and newly built Reliant products offer reliable, production-proven solutions at low cost of ownership for dielectric film applications.
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Reliant Clean Products
Lam’s refurbished and newly built Reliant products offer reliable, production-proven solutions at low cost of ownership for a range of frontside and backside/bevel cleans.
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Reliant Etch Products
Lam’s refurbished and newly built Reliant products offer reliable, production-proven solutions at low cost of ownership for conductor, dielectric, and metal etch applications.
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DSiE Product Family
These products deliver exceptional process control at high productivity for several critical and non-critical deep silicon etch applications.
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Metryx Product Family
Lam’s mass metrology systems deliver sub-milligram measurement capability for advanced process monitoring and control of three-dimensional device structures.
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Coronus Product Family
These bevel clean systems remove unwanted materials from the wafer’s edge while protecting the active die area to enhance die yield.
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SP Series Product Family
This proven product family delivers reliable, cost-efficient wet clean/wet etch solutions that gently remove unwanted materials from the wafer.
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DV-Prime & Da Vinci Product Families
These products provide the process flexibility needed with high productivity to address multiple wafer cleaning steps throughout manufacturing.
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EOS Product Family
Lam’s advanced wet clean products deliver exceptionally low on-wafer defectivity at high throughput for progressively demanding applications.
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GAMMA Product Family
These products provide the process flexibility needed to address a wide range of critical photoresist strip applications.