Solution: Sensors & Transducers
VECTOR Product Family
Plasma-Enhanced Chemical Vapor Deposition (PECVD)
Lam’s PECVD product family provides precise dielectric film deposition at high productivity for a wide range of device applications.
Plasma-Enhanced Chemical Vapor Deposition (PECVD)
Lam’s PECVD product family provides precise dielectric film deposition at high productivity for a wide range of device applications.