Technology: Atomic Layer Etch (ALE)

Flex Product Family

Atomic Layer Etch (ALE) Reactive Ion Etch (RIE)

Lam’s dielectric etch systems offer application-focused capabilities for creating a wide range of challenging structures in advanced devices.

Advanced Memory, Analog & Mixed Signal, Discrete & Power Devices, Interconnect, Optoelectronics & Photonics, Packaging, Patterning, Transistor

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Kiyo Product Family

Atomic Layer Etch (ALE) Reactive Ion Etch (RIE)

Lam’s market-leading conductor etch products deliver the high-performance precision and control at high productivity needed for critical device features.

Advanced Memory, Analog & Mixed Signal, Discrete & Power Devices, Interconnect, Patterning, Sensors & Transducers, Transistor

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