Technology: Atomic Layer Etch (ALE)
Flex Product Family
Atomic Layer Etch (ALE) Reactive Ion Etch (RIE)
Lam’s dielectric etch systems offer application-focused capabilities for creating a wide range of challenging structures in advanced devices.
Kiyo Product Family
Atomic Layer Etch (ALE) Reactive Ion Etch (RIE)
Lam’s market-leading conductor etch products deliver the high-performance precision and control at high productivity needed for critical device features.