Deep Reactive Ion Etch (DRIE)
These products deliver exceptional process control at high productivity for several critical and non-critical deep silicon etch applications.
Deep Reactive Ion Etch (DRIE) Reactive Ion Etch (RIE) Reliant Systems
Lam’s refurbished and newly built Reliant products offer reliable, production-proven solutions at low cost of ownership for conductor, dielectric, and metal etch applications.
Deep Reactive Ion Etch (DRIE) Reactive Ion Etch (RIE)
For deep etch applications, this product family provides the exceptional across-wafer uniformity control needed for critical high aspect ratio features.