Technology: Reactive Ion Etch (RIE)

Lam’s dielectric etch systems offer application-focused capabilities for creating a wide range of challenging structures in advanced devices.

Lam’s market-leading conductor etch products deliver the high-performance precision and control at high productivity needed for critical device features.

Lam’s refurbished and newly built Reliant products offer reliable, production-proven solutions at low cost of ownership for conductor, dielectric, and metal etch applications.

For deep etch applications, this product family provides the exceptional across-wafer uniformity control needed for critical high aspect ratio features.

These metal etch products provide excellent process control at high-productivity for electrical connection and metal hardmask applications.