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[보관함:] Products

  • SPEED Product Family

    These dielectric deposition products provide complete gapfill of high aspect ratio spaces with industry-leading throughput and reliability.

  • Striker Product Family

    Using advanced ALD technology, these products deliver dielectric films with exceptional control for critical processes in advanced devices with nanoscale features.

  • VECTOR Product Family

    Lam’s PECVD product family provides precise dielectric film deposition at high productivity for a wide range of device applications.

  • ALTUS Product Family

    Combining CVD and ALD technologies, these market-leading systems deposit highly conformal metal films for advanced tungsten metallization applications.

  • SABRE 3D Product Family

    Using Lam’s proven Electrofill technology, these high-productivity systems deliver quality metal films for advanced packaging applications.

  • SABRE Product Family

    This product family offers precision metal plating for copper damascene manufacturing on the industry’s productivity-leading ECD platform.

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